000 | 00528nam a2200217 454500 | ||
---|---|---|---|
001 | 039718 | ||
003 | BD-ChCU | ||
008 | Eng | ||
020 | _a0387133208 | ||
040 |
_aDLC _cDLC _dBD-ChCU |
||
082 | 0 | 0 | _a530.41/T443 |
100 | 1 |
_ax _bX |
|
245 | 1 | 0 |
_aThin film and depth proile analysis _bx |
250 | _ax | ||
260 |
_aBerlin ; New York _bSpringer - Verlag _c1984 |
||
300 | _axi, 205 | ||
504 | _aInlcudes | ||
650 | 0 |
_aThin film - surcfaces _bSpauttering (Physics) |
|
700 | 1 | _aOechsner, H. | |
942 |
_2ddc _cBK |
||
999 |
_c39718 _d39718 |