000 00528nam a2200217 454500
001 039718
003 BD-ChCU
008 Eng
020 _a0387133208
040 _aDLC
_cDLC
_dBD-ChCU
082 0 0 _a530.41/T443
100 1 _ax
_bX
245 1 0 _aThin film and depth proile analysis
_bx
250 _ax
260 _aBerlin ; New York
_bSpringer - Verlag
_c1984
300 _axi, 205
504 _aInlcudes
650 0 _aThin film - surcfaces
_bSpauttering (Physics)
700 1 _aOechsner, H.
942 _2ddc
_cBK
999 _c39718
_d39718