TY  - BOOK
AU  - x, X
AU  - Oechsner,H.
TI  - Thin film and depth proile analysis: x
SN  - 0387133208
U1  - 530.41/T443 
PY  - 1984///
CY  - Berlin ; New York
PB  - Springer - Verlag
KW  - Thin film - surcfaces
KW  - Spauttering (Physics)
N1  - Inlcudes
ER  -